8/9/2010	7:02:31 AM	Recipe started at 7:02 AM
8/9/2010	7:02:31 AM	Helium valve closed
8/9/2010	7:02:31 AM	BCl3 valve closed
8/9/2010	7:02:31 AM	PH3 valve closed
8/9/2010	7:02:31 AM	SiCl4 pre valve closed
8/9/2010	7:02:31 AM	SiCl4 post valve closed
8/9/2010	7:02:31 AM	Main Vac valve closed
8/9/2010	7:02:31 AM	Bypass valve closed
8/9/2010	7:02:31 AM	Bubbler valve closed
8/9/2010	7:02:31 AM	H2 valve opened
8/9/2010	7:02:31 AM	Helium MFC set to  0.000000
8/9/2010	7:02:31 AM	H2 MFC set to  500.000000
8/9/2010	7:02:31 AM	BCl3 MFC set to  0.000000
8/9/2010	7:02:31 AM	PHl3 MFC set to  0.000000
8/9/2010	7:02:31 AM	SiCl4 MFC set to  0.000000
8/9/2010	7:02:31 AM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:02:31 AM	Tube furnace set to 0
8/9/2010	7:03:54 AM	Helium valve closed
8/9/2010	7:03:54 AM	BCl3 valve closed
8/9/2010	7:03:54 AM	PH3 valve closed
8/9/2010	7:03:54 AM	SiCl4 pre valve closed
8/9/2010	7:03:54 AM	SiCl4 post valve closed
8/9/2010	7:03:54 AM	Main Vac valve closed
8/9/2010	7:03:54 AM	Bypass valve closed
8/9/2010	7:03:54 AM	H2 valve opened
8/9/2010	7:03:54 AM	Bubbler valve opened
8/9/2010	7:03:54 AM	Helium MFC set to  0.000000
8/9/2010	7:03:54 AM	H2 MFC set to  500.000000
8/9/2010	7:03:54 AM	BCl3 MFC set to  0.000000
8/9/2010	7:03:54 AM	PHl3 MFC set to  0.000000
8/9/2010	7:03:54 AM	SiCl4 MFC set to  0.000000
8/9/2010	7:03:54 AM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:03:55 AM	Tube furnace set to 1000
8/9/2010	7:23:55 AM	Helium valve closed
8/9/2010	7:23:55 AM	PH3 valve closed
8/9/2010	7:23:55 AM	Main Vac valve closed
8/9/2010	7:23:55 AM	Bypass valve closed
8/9/2010	7:23:55 AM	H2 valve opened
8/9/2010	7:23:55 AM	BCl3 valve opened
8/9/2010	7:23:55 AM	SiCl4 pre valve opened
8/9/2010	7:23:55 AM	SiCl4 post valve opened
8/9/2010	7:23:55 AM	Bubbler valve opened
8/9/2010	7:23:55 AM	Helium MFC set to  0.000000
8/9/2010	7:23:55 AM	H2 MFC set to  500.000000
8/9/2010	7:23:55 AM	BCl3 MFC set to  5.000000
8/9/2010	7:23:55 AM	PHl3 MFC set to  0.000000
8/9/2010	7:23:55 AM	SiCl4 MFC set to  50.000000
8/9/2010	7:23:55 AM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:23:55 AM	Tube furnace set to 1000
8/9/2010	7:38:55 AM	H2 valve closed
8/9/2010	7:38:55 AM	BCl3 valve closed
8/9/2010	7:38:55 AM	PH3 valve closed
8/9/2010	7:38:55 AM	SiCl4 pre valve closed
8/9/2010	7:38:55 AM	SiCl4 post valve closed
8/9/2010	7:38:55 AM	Main Vac valve closed
8/9/2010	7:38:55 AM	Bypass valve closed
8/9/2010	7:38:55 AM	Helium valve opened
8/9/2010	7:38:55 AM	Bubbler valve opened
8/9/2010	7:38:55 AM	Helium MFC set to  500.000000
8/9/2010	7:38:55 AM	H2 MFC set to  0.000000
8/9/2010	7:38:55 AM	BCl3 MFC set to  0.000000
8/9/2010	7:38:55 AM	PHl3 MFC set to  0.000000
8/9/2010	7:38:55 AM	SiCl4 MFC set to  0.000000
8/9/2010	7:38:55 AM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:38:55 AM	Tube furnace set to 0
8/9/2010	7:58:55 AM	Helium valve closed
8/9/2010	7:58:55 AM	H2 valve closed
8/9/2010	7:58:55 AM	BCl3 valve closed
8/9/2010	7:58:55 AM	PH3 valve closed
8/9/2010	7:58:55 AM	SiCl4 pre valve closed
8/9/2010	7:58:55 AM	SiCl4 post valve closed
8/9/2010	7:58:55 AM	Main Vac valve closed
8/9/2010	7:58:55 AM	Bypass valve closed
8/9/2010	7:58:55 AM	Bubbler valve closed
8/9/2010	7:58:55 AM	Helium MFC set to  0.000000
8/9/2010	7:58:55 AM	H2 MFC set to  0.000000
8/9/2010	7:58:55 AM	BCl3 MFC set to  0.000000
8/9/2010	7:58:55 AM	PHl3 MFC set to  0.000000
8/9/2010	7:58:55 AM	SiCl4 MFC set to  0.000000
8/9/2010	7:58:55 AM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:58:55 AM	Tube furnace set to 0
8/9/2010	7:58:56 AM	Run finished at 7:58 AM
8/9/2010	11:01:09 AM	Program started after a nonstandard shutdown
8/9/2010	11:01:09 AM	Helium valve closed
8/9/2010	11:01:09 AM	H2 valve closed
8/9/2010	11:01:09 AM	BCl3 valve closed
8/9/2010	11:01:09 AM	PH3 valve closed
8/9/2010	11:01:09 AM	SiCl4 pre valve closed
8/9/2010	11:01:09 AM	SiCl4 post valve closed
8/9/2010	11:01:09 AM	Main Vac valve closed
8/9/2010	11:01:09 AM	Bypass valve closed
8/9/2010	11:01:09 AM	Bubbler valve closed
8/9/2010	11:01:09 AM	Helium MFC set to  0.000000
8/9/2010	11:01:09 AM	H2 MFC set to  0.000000
8/9/2010	11:01:09 AM	BCl3 MFC set to  0.000000
8/9/2010	11:01:09 AM	PHl3 MFC set to  0.000000
8/9/2010	11:01:09 AM	SiCl4 MFC set to  0.000000
8/9/2010	11:01:09 AM	Bypass solenoid MFC set to  760.000000
8/9/2010	11:01:09 AM	Tube furnace set to 0
8/9/2010	11:01:19 AM	Tube furnace set to 10
8/9/2010	11:01:22 AM	Tube furnace set to 50
8/9/2010	11:01:26 AM	Tube furnace set to 0
8/9/2010	11:01:35 AM	Program exited cleanly
8/9/2010	11:01:38 AM	Program started normally
8/9/2010	11:01:38 AM	Helium valve closed
8/9/2010	11:01:38 AM	H2 valve closed
8/9/2010	11:01:38 AM	BCl3 valve closed
8/9/2010	11:01:38 AM	PH3 valve closed
8/9/2010	11:01:38 AM	SiCl4 pre valve closed
8/9/2010	11:01:38 AM	SiCl4 post valve closed
8/9/2010	11:01:38 AM	Main Vac valve closed
8/9/2010	11:01:38 AM	Bypass valve closed
8/9/2010	11:01:38 AM	Bubbler valve closed
8/9/2010	11:01:38 AM	Helium MFC set to  0.000000
8/9/2010	11:01:38 AM	H2 MFC set to  0.000000
8/9/2010	11:01:38 AM	BCl3 MFC set to  0.000000
8/9/2010	11:01:38 AM	PHl3 MFC set to  0.000000
8/9/2010	11:01:38 AM	SiCl4 MFC set to  0.000000
8/9/2010	11:01:38 AM	Bypass solenoid MFC set to  760.000000
8/9/2010	11:01:38 AM	Tube furnace set to 0
8/9/2010	11:01:42 AM	Program exited cleanly
8/9/2010	11:07:28 AM	Program started normally
8/9/2010	11:07:29 AM	Helium valve closed
8/9/2010	11:07:29 AM	H2 valve closed
8/9/2010	11:07:29 AM	BCl3 valve closed
8/9/2010	11:07:29 AM	PH3 valve closed
8/9/2010	11:07:29 AM	SiCl4 pre valve closed
8/9/2010	11:07:29 AM	SiCl4 post valve closed
8/9/2010	11:07:29 AM	Main Vac valve closed
8/9/2010	11:07:29 AM	Bypass valve closed
8/9/2010	11:07:29 AM	Bubbler valve closed
8/9/2010	11:07:29 AM	Helium MFC set to  0.000000
8/9/2010	11:07:29 AM	H2 MFC set to  0.000000
8/9/2010	11:07:29 AM	BCl3 MFC set to  0.000000
8/9/2010	11:07:29 AM	PHl3 MFC set to  0.000000
8/9/2010	11:07:29 AM	SiCl4 MFC set to  0.000000
8/9/2010	11:07:29 AM	Bypass solenoid MFC set to  760.000000
8/9/2010	11:07:29 AM	Tube furnace set to 0
8/9/2010	11:07:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	11:07:31 AM	Recipe started at 11:07 AM
8/9/2010	11:07:31 AM	Helium valve closed
8/9/2010	11:07:31 AM	H2 valve closed
8/9/2010	11:07:31 AM	BCl3 valve closed
8/9/2010	11:07:31 AM	PH3 valve closed
8/9/2010	11:07:31 AM	SiCl4 pre valve closed
8/9/2010	11:07:31 AM	SiCl4 post valve closed
8/9/2010	11:07:31 AM	Main Vac valve closed
8/9/2010	11:07:31 AM	Bubbler valve closed
8/9/2010	11:07:31 AM	Bypass valve opened
8/9/2010	11:07:31 AM	Helium MFC set to  0.000000
8/9/2010	11:07:31 AM	H2 MFC set to  0.000000
8/9/2010	11:07:31 AM	BCl3 MFC set to  0.000000
8/9/2010	11:07:31 AM	PHl3 MFC set to  0.000000
8/9/2010	11:07:31 AM	SiCl4 MFC set to  0.000000
8/9/2010	11:07:31 AM	Bypass solenoid MFC set to  0.000000
8/9/2010	11:07:31 AM	Tube furnace set to 0
8/9/2010	11:08:14 AM	Helium valve closed
8/9/2010	11:08:14 AM	H2 valve closed
8/9/2010	11:08:14 AM	BCl3 valve closed
8/9/2010	11:08:14 AM	PH3 valve closed
8/9/2010	11:08:14 AM	SiCl4 pre valve closed
8/9/2010	11:08:14 AM	SiCl4 post valve closed
8/9/2010	11:08:14 AM	Bubbler valve closed
8/9/2010	11:08:14 AM	Main Vac valve opened
8/9/2010	11:08:14 AM	Bypass valve opened
8/9/2010	11:08:14 AM	Helium MFC set to  0.000000
8/9/2010	11:08:14 AM	H2 MFC set to  0.000000
8/9/2010	11:08:14 AM	BCl3 MFC set to  0.000000
8/9/2010	11:08:14 AM	PHl3 MFC set to  0.000000
8/9/2010	11:08:14 AM	SiCl4 MFC set to  0.000000
8/9/2010	11:08:14 AM	Bypass solenoid MFC set to  0.000000
8/9/2010	11:08:14 AM	Tube furnace set to 0
8/9/2010	11:08:14 AM	Run finished at 11:08 AM
8/9/2010	11:08:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	1:09:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/9/2010	1:09:51 PM	Recipe started at 1:09 PM
8/9/2010	1:09:51 PM	Helium valve closed
8/9/2010	1:09:51 PM	H2 valve closed
8/9/2010	1:09:51 PM	BCl3 valve closed
8/9/2010	1:09:51 PM	PH3 valve closed
8/9/2010	1:09:51 PM	SiCl4 pre valve closed
8/9/2010	1:09:51 PM	SiCl4 post valve closed
8/9/2010	1:09:51 PM	Main Vac valve closed
8/9/2010	1:09:51 PM	Bypass valve closed
8/9/2010	1:09:51 PM	Bubbler valve closed
8/9/2010	1:09:51 PM	Helium MFC set to  0.000000
8/9/2010	1:09:51 PM	H2 MFC set to  0.000000
8/9/2010	1:09:51 PM	BCl3 MFC set to  0.000000
8/9/2010	1:09:51 PM	PHl3 MFC set to  0.000000
8/9/2010	1:09:51 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:09:51 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:09:51 PM	Tube furnace set to 0
8/9/2010	1:09:51 PM	Run finished at 1:09 PM
8/9/2010	1:09:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/9/2010	1:10:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	1:10:01 PM	Recipe started at 1:10 PM
8/9/2010	1:10:01 PM	Helium valve closed
8/9/2010	1:10:01 PM	H2 valve closed
8/9/2010	1:10:01 PM	BCl3 valve closed
8/9/2010	1:10:01 PM	PH3 valve closed
8/9/2010	1:10:01 PM	SiCl4 pre valve closed
8/9/2010	1:10:01 PM	SiCl4 post valve closed
8/9/2010	1:10:01 PM	Main Vac valve closed
8/9/2010	1:10:01 PM	Bubbler valve closed
8/9/2010	1:10:01 PM	Bypass valve opened
8/9/2010	1:10:01 PM	Helium MFC set to  0.000000
8/9/2010	1:10:01 PM	H2 MFC set to  0.000000
8/9/2010	1:10:01 PM	BCl3 MFC set to  0.000000
8/9/2010	1:10:01 PM	PHl3 MFC set to  0.000000
8/9/2010	1:10:01 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:10:01 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:10:01 PM	Tube furnace set to 0
8/9/2010	1:10:01 PM	Helium valve closed
8/9/2010	1:10:01 PM	H2 valve closed
8/9/2010	1:10:01 PM	BCl3 valve closed
8/9/2010	1:10:01 PM	PH3 valve closed
8/9/2010	1:10:01 PM	SiCl4 pre valve closed
8/9/2010	1:10:01 PM	SiCl4 post valve closed
8/9/2010	1:10:01 PM	Bubbler valve closed
8/9/2010	1:10:01 PM	Main Vac valve opened
8/9/2010	1:10:01 PM	Bypass valve opened
8/9/2010	1:10:01 PM	Helium MFC set to  0.000000
8/9/2010	1:10:01 PM	H2 MFC set to  0.000000
8/9/2010	1:10:01 PM	BCl3 MFC set to  0.000000
8/9/2010	1:10:01 PM	PHl3 MFC set to  0.000000
8/9/2010	1:10:01 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:10:01 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:10:02 PM	Tube furnace set to 0
8/9/2010	1:10:02 PM	Run finished at 1:10 PM
8/9/2010	1:10:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	1:10:17 PM	Recipe started at 1:10 PM
8/9/2010	1:10:17 PM	Helium valve closed
8/9/2010	1:10:17 PM	H2 valve closed
8/9/2010	1:10:17 PM	BCl3 valve closed
8/9/2010	1:10:17 PM	PH3 valve closed
8/9/2010	1:10:17 PM	SiCl4 pre valve closed
8/9/2010	1:10:17 PM	SiCl4 post valve closed
8/9/2010	1:10:17 PM	Main Vac valve closed
8/9/2010	1:10:17 PM	Bubbler valve closed
8/9/2010	1:10:17 PM	Bypass valve opened
8/9/2010	1:10:17 PM	Helium MFC set to  0.000000
8/9/2010	1:10:17 PM	H2 MFC set to  0.000000
8/9/2010	1:10:17 PM	BCl3 MFC set to  0.000000
8/9/2010	1:10:17 PM	PHl3 MFC set to  0.000000
8/9/2010	1:10:17 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:10:17 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:10:17 PM	Tube furnace set to 0
8/9/2010	1:10:17 PM	Helium valve closed
8/9/2010	1:10:17 PM	H2 valve closed
8/9/2010	1:10:17 PM	BCl3 valve closed
8/9/2010	1:10:17 PM	PH3 valve closed
8/9/2010	1:10:17 PM	SiCl4 pre valve closed
8/9/2010	1:10:17 PM	SiCl4 post valve closed
8/9/2010	1:10:17 PM	Bubbler valve closed
8/9/2010	1:10:17 PM	Main Vac valve opened
8/9/2010	1:10:17 PM	Bypass valve opened
8/9/2010	1:10:17 PM	Helium MFC set to  0.000000
8/9/2010	1:10:17 PM	H2 MFC set to  0.000000
8/9/2010	1:10:17 PM	BCl3 MFC set to  0.000000
8/9/2010	1:10:17 PM	PHl3 MFC set to  0.000000
8/9/2010	1:10:17 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:10:17 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:10:17 PM	Tube furnace set to 0
8/9/2010	1:11:17 PM	H2 valve closed
8/9/2010	1:11:17 PM	BCl3 valve closed
8/9/2010	1:11:17 PM	PH3 valve closed
8/9/2010	1:11:17 PM	SiCl4 pre valve closed
8/9/2010	1:11:17 PM	SiCl4 post valve closed
8/9/2010	1:11:17 PM	Bubbler valve closed
8/9/2010	1:11:17 PM	Helium valve opened
8/9/2010	1:11:17 PM	Main Vac valve opened
8/9/2010	1:11:17 PM	Bypass valve opened
8/9/2010	1:11:17 PM	Helium MFC set to  100.000000
8/9/2010	1:11:17 PM	H2 MFC set to  0.000000
8/9/2010	1:11:17 PM	BCl3 MFC set to  0.000000
8/9/2010	1:11:17 PM	PHl3 MFC set to  0.000000
8/9/2010	1:11:17 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:11:17 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:11:18 PM	Tube furnace set to 0
8/9/2010	1:20:18 PM	Helium valve closed
8/9/2010	1:20:18 PM	H2 valve closed
8/9/2010	1:20:18 PM	BCl3 valve closed
8/9/2010	1:20:18 PM	PH3 valve closed
8/9/2010	1:20:18 PM	SiCl4 pre valve closed
8/9/2010	1:20:18 PM	SiCl4 post valve closed
8/9/2010	1:20:18 PM	Bubbler valve closed
8/9/2010	1:20:18 PM	Main Vac valve opened
8/9/2010	1:20:18 PM	Bypass valve opened
8/9/2010	1:20:18 PM	Helium MFC set to  0.000000
8/9/2010	1:20:18 PM	H2 MFC set to  0.000000
8/9/2010	1:20:18 PM	BCl3 MFC set to  0.000000
8/9/2010	1:20:18 PM	PHl3 MFC set to  0.000000
8/9/2010	1:20:18 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:20:18 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:20:18 PM	Tube furnace set to 0
8/9/2010	1:21:18 PM	H2 valve closed
8/9/2010	1:21:18 PM	BCl3 valve closed
8/9/2010	1:21:18 PM	PH3 valve closed
8/9/2010	1:21:18 PM	SiCl4 pre valve closed
8/9/2010	1:21:18 PM	SiCl4 post valve closed
8/9/2010	1:21:18 PM	Bubbler valve closed
8/9/2010	1:21:18 PM	Helium valve opened
8/9/2010	1:21:18 PM	Main Vac valve opened
8/9/2010	1:21:18 PM	Bypass valve opened
8/9/2010	1:21:18 PM	Helium MFC set to  100.000000
8/9/2010	1:21:18 PM	H2 MFC set to  0.000000
8/9/2010	1:21:18 PM	BCl3 MFC set to  0.000000
8/9/2010	1:21:18 PM	PHl3 MFC set to  0.000000
8/9/2010	1:21:18 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:21:18 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:21:18 PM	Tube furnace set to 0
8/9/2010	1:30:18 PM	Helium valve closed
8/9/2010	1:30:18 PM	H2 valve closed
8/9/2010	1:30:18 PM	BCl3 valve closed
8/9/2010	1:30:18 PM	PH3 valve closed
8/9/2010	1:30:18 PM	SiCl4 pre valve closed
8/9/2010	1:30:18 PM	SiCl4 post valve closed
8/9/2010	1:30:18 PM	Bubbler valve closed
8/9/2010	1:30:18 PM	Main Vac valve opened
8/9/2010	1:30:18 PM	Bypass valve opened
8/9/2010	1:30:18 PM	Helium MFC set to  0.000000
8/9/2010	1:30:18 PM	H2 MFC set to  0.000000
8/9/2010	1:30:18 PM	BCl3 MFC set to  0.000000
8/9/2010	1:30:18 PM	PHl3 MFC set to  0.000000
8/9/2010	1:30:18 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:30:18 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:30:18 PM	Tube furnace set to 0
8/9/2010	1:31:18 PM	H2 valve closed
8/9/2010	1:31:18 PM	BCl3 valve closed
8/9/2010	1:31:18 PM	PH3 valve closed
8/9/2010	1:31:18 PM	SiCl4 pre valve closed
8/9/2010	1:31:18 PM	SiCl4 post valve closed
8/9/2010	1:31:18 PM	Bubbler valve closed
8/9/2010	1:31:18 PM	Helium valve opened
8/9/2010	1:31:18 PM	Main Vac valve opened
8/9/2010	1:31:18 PM	Bypass valve opened
8/9/2010	1:31:18 PM	Helium MFC set to  100.000000
8/9/2010	1:31:18 PM	H2 MFC set to  0.000000
8/9/2010	1:31:18 PM	BCl3 MFC set to  0.000000
8/9/2010	1:31:18 PM	PHl3 MFC set to  0.000000
8/9/2010	1:31:18 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:31:18 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:31:18 PM	Tube furnace set to 0
8/9/2010	1:40:18 PM	Helium valve closed
8/9/2010	1:40:18 PM	H2 valve closed
8/9/2010	1:40:18 PM	BCl3 valve closed
8/9/2010	1:40:18 PM	PH3 valve closed
8/9/2010	1:40:18 PM	SiCl4 pre valve closed
8/9/2010	1:40:18 PM	SiCl4 post valve closed
8/9/2010	1:40:18 PM	Bubbler valve closed
8/9/2010	1:40:18 PM	Main Vac valve opened
8/9/2010	1:40:18 PM	Bypass valve opened
8/9/2010	1:40:18 PM	Helium MFC set to  0.000000
8/9/2010	1:40:18 PM	H2 MFC set to  0.000000
8/9/2010	1:40:18 PM	BCl3 MFC set to  0.000000
8/9/2010	1:40:18 PM	PHl3 MFC set to  0.000000
8/9/2010	1:40:18 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:40:18 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:40:18 PM	Tube furnace set to 0
8/9/2010	1:40:19 PM	Run finished at 1:40 PM
8/9/2010	1:41:20 PM	Recipe started at 1:41 PM
8/9/2010	1:41:20 PM	Helium valve closed
8/9/2010	1:41:20 PM	BCl3 valve closed
8/9/2010	1:41:20 PM	PH3 valve closed
8/9/2010	1:41:20 PM	SiCl4 pre valve closed
8/9/2010	1:41:20 PM	SiCl4 post valve closed
8/9/2010	1:41:20 PM	Main Vac valve closed
8/9/2010	1:41:20 PM	Bypass valve closed
8/9/2010	1:41:20 PM	Bubbler valve closed
8/9/2010	1:41:20 PM	H2 valve opened
8/9/2010	1:41:20 PM	Helium MFC set to  0.000000
8/9/2010	1:41:20 PM	H2 MFC set to  500.000000
8/9/2010	1:41:20 PM	BCl3 MFC set to  0.000000
8/9/2010	1:41:20 PM	PHl3 MFC set to  0.000000
8/9/2010	1:41:20 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:41:20 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:41:20 PM	Tube furnace set to 0
8/9/2010	1:42:42 PM	Helium valve closed
8/9/2010	1:42:42 PM	BCl3 valve closed
8/9/2010	1:42:42 PM	PH3 valve closed
8/9/2010	1:42:42 PM	SiCl4 pre valve closed
8/9/2010	1:42:42 PM	SiCl4 post valve closed
8/9/2010	1:42:42 PM	Main Vac valve closed
8/9/2010	1:42:42 PM	Bypass valve closed
8/9/2010	1:42:42 PM	H2 valve opened
8/9/2010	1:42:42 PM	Bubbler valve opened
8/9/2010	1:42:42 PM	Helium MFC set to  0.000000
8/9/2010	1:42:42 PM	H2 MFC set to  500.000000
8/9/2010	1:42:42 PM	BCl3 MFC set to  0.000000
8/9/2010	1:42:42 PM	PHl3 MFC set to  0.000000
8/9/2010	1:42:42 PM	SiCl4 MFC set to  0.000000
8/9/2010	1:42:42 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	1:42:42 PM	Tube furnace set to 1000
8/9/2010	2:02:42 PM	Helium valve closed
8/9/2010	2:02:42 PM	PH3 valve closed
8/9/2010	2:02:42 PM	Main Vac valve closed
8/9/2010	2:02:42 PM	Bypass valve closed
8/9/2010	2:02:42 PM	H2 valve opened
8/9/2010	2:02:42 PM	BCl3 valve opened
8/9/2010	2:02:42 PM	SiCl4 pre valve opened
8/9/2010	2:02:42 PM	SiCl4 post valve opened
8/9/2010	2:02:42 PM	Bubbler valve opened
8/9/2010	2:02:42 PM	Helium MFC set to  0.000000
8/9/2010	2:02:42 PM	H2 MFC set to  500.000000
8/9/2010	2:02:42 PM	BCl3 MFC set to  5.000000
8/9/2010	2:02:42 PM	PHl3 MFC set to  0.000000
8/9/2010	2:02:42 PM	SiCl4 MFC set to  50.000000
8/9/2010	2:02:42 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	2:02:42 PM	Tube furnace set to 1000
8/9/2010	2:17:42 PM	H2 valve closed
8/9/2010	2:17:42 PM	BCl3 valve closed
8/9/2010	2:17:42 PM	PH3 valve closed
8/9/2010	2:17:42 PM	SiCl4 pre valve closed
8/9/2010	2:17:42 PM	SiCl4 post valve closed
8/9/2010	2:17:42 PM	Main Vac valve closed
8/9/2010	2:17:42 PM	Bypass valve closed
8/9/2010	2:17:42 PM	Helium valve opened
8/9/2010	2:17:42 PM	Bubbler valve opened
8/9/2010	2:17:42 PM	Helium MFC set to  500.000000
8/9/2010	2:17:42 PM	H2 MFC set to  0.000000
8/9/2010	2:17:42 PM	BCl3 MFC set to  0.000000
8/9/2010	2:17:42 PM	PHl3 MFC set to  0.000000
8/9/2010	2:17:42 PM	SiCl4 MFC set to  0.000000
8/9/2010	2:17:42 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	2:17:42 PM	Tube furnace set to 0
8/9/2010	2:37:42 PM	Helium valve closed
8/9/2010	2:37:42 PM	H2 valve closed
8/9/2010	2:37:42 PM	BCl3 valve closed
8/9/2010	2:37:42 PM	PH3 valve closed
8/9/2010	2:37:42 PM	SiCl4 pre valve closed
8/9/2010	2:37:42 PM	SiCl4 post valve closed
8/9/2010	2:37:42 PM	Main Vac valve closed
8/9/2010	2:37:42 PM	Bypass valve closed
8/9/2010	2:37:42 PM	Bubbler valve closed
8/9/2010	2:37:42 PM	Helium MFC set to  0.000000
8/9/2010	2:37:42 PM	H2 MFC set to  0.000000
8/9/2010	2:37:42 PM	BCl3 MFC set to  0.000000
8/9/2010	2:37:42 PM	PHl3 MFC set to  0.000000
8/9/2010	2:37:42 PM	SiCl4 MFC set to  0.000000
8/9/2010	2:37:42 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	2:37:43 PM	Tube furnace set to 0
8/9/2010	2:37:43 PM	Run finished at 2:37 PM
8/9/2010	2:41:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2010	2:41:14 PM	Recipe started at 2:41 PM
8/9/2010	2:41:14 PM	H2 valve closed
8/9/2010	2:41:14 PM	BCl3 valve closed
8/9/2010	2:41:14 PM	PH3 valve closed
8/9/2010	2:41:14 PM	SiCl4 pre valve closed
8/9/2010	2:41:14 PM	SiCl4 post valve closed
8/9/2010	2:41:14 PM	Main Vac valve closed
8/9/2010	2:41:14 PM	Bypass valve closed
8/9/2010	2:41:14 PM	Bubbler valve closed
8/9/2010	2:41:14 PM	Helium valve opened
8/9/2010	2:41:14 PM	Helium MFC set to  500.000000
8/9/2010	2:41:14 PM	H2 MFC set to  0.000000
8/9/2010	2:41:14 PM	BCl3 MFC set to  0.000000
8/9/2010	2:41:14 PM	PHl3 MFC set to  0.000000
8/9/2010	2:41:14 PM	SiCl4 MFC set to  0.000000
8/9/2010	2:41:14 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	2:41:14 PM	Tube furnace set to 0
8/9/2010	2:41:16 PM	Helium valve closed
8/9/2010	2:41:16 PM	H2 valve closed
8/9/2010	2:41:16 PM	BCl3 valve closed
8/9/2010	2:41:16 PM	PH3 valve closed
8/9/2010	2:41:16 PM	SiCl4 pre valve closed
8/9/2010	2:41:16 PM	SiCl4 post valve closed
8/9/2010	2:41:16 PM	Main Vac valve closed
8/9/2010	2:41:16 PM	Bypass valve closed
8/9/2010	2:41:16 PM	Bubbler valve closed
8/9/2010	2:41:16 PM	Helium MFC set to  0.000000
8/9/2010	2:41:16 PM	H2 MFC set to  0.000000
8/9/2010	2:41:16 PM	BCl3 MFC set to  0.000000
8/9/2010	2:41:16 PM	PHl3 MFC set to  0.000000
8/9/2010	2:41:16 PM	SiCl4 MFC set to  0.000000
8/9/2010	2:41:16 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	2:41:16 PM	Tube furnace set to 0
8/9/2010	2:41:17 PM	Run finished at 2:41 PM
8/9/2010	2:41:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2010	2:50:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	2:50:57 PM	Recipe started at 2:50 PM
8/9/2010	2:50:57 PM	Helium valve closed
8/9/2010	2:50:57 PM	H2 valve closed
8/9/2010	2:50:57 PM	BCl3 valve closed
8/9/2010	2:50:57 PM	PH3 valve closed
8/9/2010	2:50:57 PM	SiCl4 pre valve closed
8/9/2010	2:50:57 PM	SiCl4 post valve closed
8/9/2010	2:50:57 PM	Main Vac valve closed
8/9/2010	2:50:57 PM	Bubbler valve closed
8/9/2010	2:50:57 PM	Bypass valve opened
8/9/2010	2:50:57 PM	Helium MFC set to  0.000000
8/9/2010	2:50:57 PM	H2 MFC set to  0.000000
8/9/2010	2:50:57 PM	BCl3 MFC set to  0.000000
8/9/2010	2:50:57 PM	PHl3 MFC set to  0.000000
8/9/2010	2:50:57 PM	SiCl4 MFC set to  0.000000
8/9/2010	2:50:57 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	2:50:57 PM	Tube furnace set to 0
8/9/2010	2:51:35 PM	Helium valve closed
8/9/2010	2:51:35 PM	H2 valve closed
8/9/2010	2:51:35 PM	BCl3 valve closed
8/9/2010	2:51:35 PM	PH3 valve closed
8/9/2010	2:51:35 PM	SiCl4 pre valve closed
8/9/2010	2:51:35 PM	SiCl4 post valve closed
8/9/2010	2:51:35 PM	Bubbler valve closed
8/9/2010	2:51:35 PM	Main Vac valve opened
8/9/2010	2:51:35 PM	Bypass valve opened
8/9/2010	2:51:35 PM	Helium MFC set to  0.000000
8/9/2010	2:51:35 PM	H2 MFC set to  0.000000
8/9/2010	2:51:35 PM	BCl3 MFC set to  0.000000
8/9/2010	2:51:35 PM	PHl3 MFC set to  0.000000
8/9/2010	2:51:35 PM	SiCl4 MFC set to  0.000000
8/9/2010	2:51:35 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	2:51:35 PM	Tube furnace set to 0
8/9/2010	2:51:36 PM	Run finished at 2:51 PM
8/9/2010	2:51:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	3:41:27 PM	Recipe started at 3:41 PM
8/9/2010	3:41:27 PM	Helium valve closed
8/9/2010	3:41:27 PM	H2 valve closed
8/9/2010	3:41:27 PM	BCl3 valve closed
8/9/2010	3:41:27 PM	PH3 valve closed
8/9/2010	3:41:27 PM	SiCl4 pre valve closed
8/9/2010	3:41:27 PM	SiCl4 post valve closed
8/9/2010	3:41:27 PM	Main Vac valve closed
8/9/2010	3:41:27 PM	Bubbler valve closed
8/9/2010	3:41:27 PM	Bypass valve opened
8/9/2010	3:41:27 PM	Helium MFC set to  0.000000
8/9/2010	3:41:27 PM	H2 MFC set to  0.000000
8/9/2010	3:41:27 PM	BCl3 MFC set to  0.000000
8/9/2010	3:41:27 PM	PHl3 MFC set to  0.000000
8/9/2010	3:41:27 PM	SiCl4 MFC set to  0.000000
8/9/2010	3:41:27 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	3:41:27 PM	Tube furnace set to 0
8/9/2010	3:41:27 PM	Helium valve closed
8/9/2010	3:41:27 PM	H2 valve closed
8/9/2010	3:41:27 PM	BCl3 valve closed
8/9/2010	3:41:27 PM	PH3 valve closed
8/9/2010	3:41:27 PM	SiCl4 pre valve closed
8/9/2010	3:41:27 PM	SiCl4 post valve closed
8/9/2010	3:41:27 PM	Bubbler valve closed
8/9/2010	3:41:27 PM	Main Vac valve opened
8/9/2010	3:41:27 PM	Bypass valve opened
8/9/2010	3:41:27 PM	Helium MFC set to  0.000000
8/9/2010	3:41:27 PM	H2 MFC set to  0.000000
8/9/2010	3:41:27 PM	BCl3 MFC set to  0.000000
8/9/2010	3:41:27 PM	PHl3 MFC set to  0.000000
8/9/2010	3:41:27 PM	SiCl4 MFC set to  0.000000
8/9/2010	3:41:27 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	3:41:28 PM	Tube furnace set to 0
8/9/2010	3:42:28 PM	H2 valve closed
8/9/2010	3:42:28 PM	BCl3 valve closed
8/9/2010	3:42:28 PM	PH3 valve closed
8/9/2010	3:42:28 PM	SiCl4 pre valve closed
8/9/2010	3:42:28 PM	SiCl4 post valve closed
8/9/2010	3:42:28 PM	Bubbler valve closed
8/9/2010	3:42:28 PM	Helium valve opened
8/9/2010	3:42:28 PM	Main Vac valve opened
8/9/2010	3:42:28 PM	Bypass valve opened
8/9/2010	3:42:28 PM	Helium MFC set to  100.000000
8/9/2010	3:42:28 PM	H2 MFC set to  0.000000
8/9/2010	3:42:28 PM	BCl3 MFC set to  0.000000
8/9/2010	3:42:28 PM	PHl3 MFC set to  0.000000
8/9/2010	3:42:28 PM	SiCl4 MFC set to  0.000000
8/9/2010	3:42:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	3:42:28 PM	Tube furnace set to 0
8/9/2010	3:51:28 PM	Helium valve closed
8/9/2010	3:51:28 PM	H2 valve closed
8/9/2010	3:51:28 PM	BCl3 valve closed
8/9/2010	3:51:28 PM	PH3 valve closed
8/9/2010	3:51:28 PM	SiCl4 pre valve closed
8/9/2010	3:51:28 PM	SiCl4 post valve closed
8/9/2010	3:51:28 PM	Bubbler valve closed
8/9/2010	3:51:28 PM	Main Vac valve opened
8/9/2010	3:51:28 PM	Bypass valve opened
8/9/2010	3:51:28 PM	Helium MFC set to  0.000000
8/9/2010	3:51:28 PM	H2 MFC set to  0.000000
8/9/2010	3:51:28 PM	BCl3 MFC set to  0.000000
8/9/2010	3:51:28 PM	PHl3 MFC set to  0.000000
8/9/2010	3:51:28 PM	SiCl4 MFC set to  0.000000
8/9/2010	3:51:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	3:51:28 PM	Tube furnace set to 0
8/9/2010	3:52:28 PM	H2 valve closed
8/9/2010	3:52:28 PM	BCl3 valve closed
8/9/2010	3:52:28 PM	PH3 valve closed
8/9/2010	3:52:28 PM	SiCl4 pre valve closed
8/9/2010	3:52:28 PM	SiCl4 post valve closed
8/9/2010	3:52:28 PM	Bubbler valve closed
8/9/2010	3:52:28 PM	Helium valve opened
8/9/2010	3:52:28 PM	Main Vac valve opened
8/9/2010	3:52:28 PM	Bypass valve opened
8/9/2010	3:52:28 PM	Helium MFC set to  100.000000
8/9/2010	3:52:28 PM	H2 MFC set to  0.000000
8/9/2010	3:52:28 PM	BCl3 MFC set to  0.000000
8/9/2010	3:52:28 PM	PHl3 MFC set to  0.000000
8/9/2010	3:52:28 PM	SiCl4 MFC set to  0.000000
8/9/2010	3:52:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	3:52:28 PM	Tube furnace set to 0
8/9/2010	4:01:28 PM	Helium valve closed
8/9/2010	4:01:28 PM	H2 valve closed
8/9/2010	4:01:28 PM	BCl3 valve closed
8/9/2010	4:01:28 PM	PH3 valve closed
8/9/2010	4:01:28 PM	SiCl4 pre valve closed
8/9/2010	4:01:28 PM	SiCl4 post valve closed
8/9/2010	4:01:28 PM	Bubbler valve closed
8/9/2010	4:01:28 PM	Main Vac valve opened
8/9/2010	4:01:28 PM	Bypass valve opened
8/9/2010	4:01:28 PM	Helium MFC set to  0.000000
8/9/2010	4:01:28 PM	H2 MFC set to  0.000000
8/9/2010	4:01:28 PM	BCl3 MFC set to  0.000000
8/9/2010	4:01:28 PM	PHl3 MFC set to  0.000000
8/9/2010	4:01:28 PM	SiCl4 MFC set to  0.000000
8/9/2010	4:01:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	4:01:28 PM	Tube furnace set to 0
8/9/2010	4:02:28 PM	H2 valve closed
8/9/2010	4:02:28 PM	BCl3 valve closed
8/9/2010	4:02:28 PM	PH3 valve closed
8/9/2010	4:02:28 PM	SiCl4 pre valve closed
8/9/2010	4:02:28 PM	SiCl4 post valve closed
8/9/2010	4:02:28 PM	Bubbler valve closed
8/9/2010	4:02:28 PM	Helium valve opened
8/9/2010	4:02:28 PM	Main Vac valve opened
8/9/2010	4:02:28 PM	Bypass valve opened
8/9/2010	4:02:28 PM	Helium MFC set to  100.000000
8/9/2010	4:02:28 PM	H2 MFC set to  0.000000
8/9/2010	4:02:28 PM	BCl3 MFC set to  0.000000
8/9/2010	4:02:28 PM	PHl3 MFC set to  0.000000
8/9/2010	4:02:28 PM	SiCl4 MFC set to  0.000000
8/9/2010	4:02:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	4:02:28 PM	Tube furnace set to 0
8/9/2010	4:08:40 PM	Helium valve closed
8/9/2010	4:08:40 PM	H2 valve closed
8/9/2010	4:08:40 PM	BCl3 valve closed
8/9/2010	4:08:40 PM	PH3 valve closed
8/9/2010	4:08:40 PM	SiCl4 pre valve closed
8/9/2010	4:08:40 PM	SiCl4 post valve closed
8/9/2010	4:08:40 PM	Bubbler valve closed
8/9/2010	4:08:40 PM	Main Vac valve opened
8/9/2010	4:08:40 PM	Bypass valve opened
8/9/2010	4:08:40 PM	Helium MFC set to  0.000000
8/9/2010	4:08:40 PM	H2 MFC set to  0.000000
8/9/2010	4:08:40 PM	BCl3 MFC set to  0.000000
8/9/2010	4:08:40 PM	PHl3 MFC set to  0.000000
8/9/2010	4:08:40 PM	SiCl4 MFC set to  0.000000
8/9/2010	4:08:40 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	4:08:40 PM	Tube furnace set to 0
8/9/2010	4:08:41 PM	Run finished at 4:08 PM
8/9/2010	4:10:06 PM	Recipe started at 4:10 PM
8/9/2010	4:10:06 PM	Helium valve closed
8/9/2010	4:10:06 PM	BCl3 valve closed
8/9/2010	4:10:06 PM	PH3 valve closed
8/9/2010	4:10:06 PM	SiCl4 pre valve closed
8/9/2010	4:10:06 PM	SiCl4 post valve closed
8/9/2010	4:10:06 PM	Main Vac valve closed
8/9/2010	4:10:06 PM	Bypass valve closed
8/9/2010	4:10:06 PM	Bubbler valve closed
8/9/2010	4:10:06 PM	H2 valve opened
8/9/2010	4:10:06 PM	Helium MFC set to  0.000000
8/9/2010	4:10:06 PM	H2 MFC set to  500.000000
8/9/2010	4:10:06 PM	BCl3 MFC set to  0.000000
8/9/2010	4:10:06 PM	PHl3 MFC set to  0.000000
8/9/2010	4:10:06 PM	SiCl4 MFC set to  0.000000
8/9/2010	4:10:06 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	4:10:06 PM	Tube furnace set to 0
8/9/2010	4:11:25 PM	Helium valve closed
8/9/2010	4:11:25 PM	BCl3 valve closed
8/9/2010	4:11:25 PM	PH3 valve closed
8/9/2010	4:11:25 PM	SiCl4 pre valve closed
8/9/2010	4:11:25 PM	SiCl4 post valve closed
8/9/2010	4:11:25 PM	Main Vac valve closed
8/9/2010	4:11:25 PM	Bypass valve closed
8/9/2010	4:11:25 PM	H2 valve opened
8/9/2010	4:11:25 PM	Bubbler valve opened
8/9/2010	4:11:25 PM	Helium MFC set to  0.000000
8/9/2010	4:11:25 PM	H2 MFC set to  500.000000
8/9/2010	4:11:25 PM	BCl3 MFC set to  0.000000
8/9/2010	4:11:25 PM	PHl3 MFC set to  0.000000
8/9/2010	4:11:25 PM	SiCl4 MFC set to  0.000000
8/9/2010	4:11:25 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	4:11:25 PM	Tube furnace set to 1000
8/9/2010	4:31:25 PM	Helium valve closed
8/9/2010	4:31:25 PM	PH3 valve closed
8/9/2010	4:31:25 PM	Main Vac valve closed
8/9/2010	4:31:25 PM	Bypass valve closed
8/9/2010	4:31:25 PM	H2 valve opened
8/9/2010	4:31:25 PM	BCl3 valve opened
8/9/2010	4:31:25 PM	SiCl4 pre valve opened
8/9/2010	4:31:25 PM	SiCl4 post valve opened
8/9/2010	4:31:25 PM	Bubbler valve opened
8/9/2010	4:31:25 PM	Helium MFC set to  0.000000
8/9/2010	4:31:25 PM	H2 MFC set to  500.000000
8/9/2010	4:31:25 PM	BCl3 MFC set to  5.000000
8/9/2010	4:31:25 PM	PHl3 MFC set to  0.000000
8/9/2010	4:31:25 PM	SiCl4 MFC set to  50.000000
8/9/2010	4:31:25 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	4:31:25 PM	Tube furnace set to 1000
8/9/2010	4:46:25 PM	H2 valve closed
8/9/2010	4:46:25 PM	BCl3 valve closed
8/9/2010	4:46:25 PM	PH3 valve closed
8/9/2010	4:46:25 PM	SiCl4 pre valve closed
8/9/2010	4:46:25 PM	SiCl4 post valve closed
8/9/2010	4:46:25 PM	Main Vac valve closed
8/9/2010	4:46:25 PM	Bypass valve closed
8/9/2010	4:46:25 PM	Helium valve opened
8/9/2010	4:46:25 PM	Bubbler valve opened
8/9/2010	4:46:25 PM	Helium MFC set to  500.000000
8/9/2010	4:46:25 PM	H2 MFC set to  0.000000
8/9/2010	4:46:25 PM	BCl3 MFC set to  0.000000
8/9/2010	4:46:25 PM	PHl3 MFC set to  0.000000
8/9/2010	4:46:25 PM	SiCl4 MFC set to  0.000000
8/9/2010	4:46:25 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	4:46:25 PM	Tube furnace set to 0
8/9/2010	5:06:25 PM	Helium valve closed
8/9/2010	5:06:25 PM	H2 valve closed
8/9/2010	5:06:25 PM	BCl3 valve closed
8/9/2010	5:06:25 PM	PH3 valve closed
8/9/2010	5:06:25 PM	SiCl4 pre valve closed
8/9/2010	5:06:25 PM	SiCl4 post valve closed
8/9/2010	5:06:25 PM	Main Vac valve closed
8/9/2010	5:06:25 PM	Bypass valve closed
8/9/2010	5:06:25 PM	Bubbler valve closed
8/9/2010	5:06:25 PM	Helium MFC set to  0.000000
8/9/2010	5:06:25 PM	H2 MFC set to  0.000000
8/9/2010	5:06:25 PM	BCl3 MFC set to  0.000000
8/9/2010	5:06:25 PM	PHl3 MFC set to  0.000000
8/9/2010	5:06:25 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:06:25 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:06:26 PM	Tube furnace set to 0
8/9/2010	5:06:26 PM	Run finished at 5:06 PM
8/9/2010	5:10:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2010	5:10:13 PM	Recipe started at 5:10 PM
8/9/2010	5:10:13 PM	H2 valve closed
8/9/2010	5:10:13 PM	BCl3 valve closed
8/9/2010	5:10:13 PM	PH3 valve closed
8/9/2010	5:10:13 PM	SiCl4 pre valve closed
8/9/2010	5:10:13 PM	SiCl4 post valve closed
8/9/2010	5:10:13 PM	Main Vac valve closed
8/9/2010	5:10:13 PM	Bypass valve closed
8/9/2010	5:10:13 PM	Bubbler valve closed
8/9/2010	5:10:13 PM	Helium valve opened
8/9/2010	5:10:13 PM	Helium MFC set to  500.000000
8/9/2010	5:10:13 PM	H2 MFC set to  0.000000
8/9/2010	5:10:13 PM	BCl3 MFC set to  0.000000
8/9/2010	5:10:13 PM	PHl3 MFC set to  0.000000
8/9/2010	5:10:13 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:10:13 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:10:13 PM	Tube furnace set to 0
8/9/2010	5:10:15 PM	Helium valve closed
8/9/2010	5:10:15 PM	H2 valve closed
8/9/2010	5:10:15 PM	BCl3 valve closed
8/9/2010	5:10:15 PM	PH3 valve closed
8/9/2010	5:10:15 PM	SiCl4 pre valve closed
8/9/2010	5:10:15 PM	SiCl4 post valve closed
8/9/2010	5:10:15 PM	Main Vac valve closed
8/9/2010	5:10:15 PM	Bypass valve closed
8/9/2010	5:10:15 PM	Bubbler valve closed
8/9/2010	5:10:15 PM	Helium MFC set to  0.000000
8/9/2010	5:10:15 PM	H2 MFC set to  0.000000
8/9/2010	5:10:15 PM	BCl3 MFC set to  0.000000
8/9/2010	5:10:15 PM	PHl3 MFC set to  0.000000
8/9/2010	5:10:15 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:10:15 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:10:15 PM	Tube furnace set to 0
8/9/2010	5:10:16 PM	Run finished at 5:10 PM
8/9/2010	5:10:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2010	5:18:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	5:18:55 PM	Recipe started at 5:18 PM
8/9/2010	5:18:55 PM	Helium valve closed
8/9/2010	5:18:55 PM	H2 valve closed
8/9/2010	5:18:55 PM	BCl3 valve closed
8/9/2010	5:18:55 PM	PH3 valve closed
8/9/2010	5:18:55 PM	SiCl4 pre valve closed
8/9/2010	5:18:55 PM	SiCl4 post valve closed
8/9/2010	5:18:55 PM	Main Vac valve closed
8/9/2010	5:18:55 PM	Bubbler valve closed
8/9/2010	5:18:55 PM	Bypass valve opened
8/9/2010	5:18:55 PM	Helium MFC set to  0.000000
8/9/2010	5:18:55 PM	H2 MFC set to  0.000000
8/9/2010	5:18:55 PM	BCl3 MFC set to  0.000000
8/9/2010	5:18:55 PM	PHl3 MFC set to  0.000000
8/9/2010	5:18:55 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:18:55 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:18:55 PM	Tube furnace set to 0
8/9/2010	5:19:33 PM	Helium valve closed
8/9/2010	5:19:33 PM	H2 valve closed
8/9/2010	5:19:33 PM	BCl3 valve closed
8/9/2010	5:19:33 PM	PH3 valve closed
8/9/2010	5:19:33 PM	SiCl4 pre valve closed
8/9/2010	5:19:33 PM	SiCl4 post valve closed
8/9/2010	5:19:33 PM	Bubbler valve closed
8/9/2010	5:19:33 PM	Main Vac valve opened
8/9/2010	5:19:33 PM	Bypass valve opened
8/9/2010	5:19:33 PM	Helium MFC set to  0.000000
8/9/2010	5:19:33 PM	H2 MFC set to  0.000000
8/9/2010	5:19:33 PM	BCl3 MFC set to  0.000000
8/9/2010	5:19:33 PM	PHl3 MFC set to  0.000000
8/9/2010	5:19:33 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:19:33 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:19:33 PM	Tube furnace set to 0
8/9/2010	5:19:34 PM	Run finished at 5:19 PM
8/9/2010	5:19:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	5:34:52 PM	Recipe started at 5:34 PM
8/9/2010	5:34:52 PM	Helium valve closed
8/9/2010	5:34:52 PM	H2 valve closed
8/9/2010	5:34:52 PM	BCl3 valve closed
8/9/2010	5:34:52 PM	PH3 valve closed
8/9/2010	5:34:52 PM	SiCl4 pre valve closed
8/9/2010	5:34:52 PM	SiCl4 post valve closed
8/9/2010	5:34:52 PM	Main Vac valve closed
8/9/2010	5:34:52 PM	Bubbler valve closed
8/9/2010	5:34:52 PM	Bypass valve opened
8/9/2010	5:34:52 PM	Helium MFC set to  0.000000
8/9/2010	5:34:52 PM	H2 MFC set to  0.000000
8/9/2010	5:34:52 PM	BCl3 MFC set to  0.000000
8/9/2010	5:34:52 PM	PHl3 MFC set to  0.000000
8/9/2010	5:34:52 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:34:52 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:34:52 PM	Tube furnace set to 0
8/9/2010	5:34:53 PM	Helium valve closed
8/9/2010	5:34:53 PM	H2 valve closed
8/9/2010	5:34:53 PM	BCl3 valve closed
8/9/2010	5:34:53 PM	PH3 valve closed
8/9/2010	5:34:53 PM	SiCl4 pre valve closed
8/9/2010	5:34:53 PM	SiCl4 post valve closed
8/9/2010	5:34:53 PM	Bubbler valve closed
8/9/2010	5:34:53 PM	Main Vac valve opened
8/9/2010	5:34:53 PM	Bypass valve opened
8/9/2010	5:34:53 PM	Helium MFC set to  0.000000
8/9/2010	5:34:53 PM	H2 MFC set to  0.000000
8/9/2010	5:34:53 PM	BCl3 MFC set to  0.000000
8/9/2010	5:34:53 PM	PHl3 MFC set to  0.000000
8/9/2010	5:34:53 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:34:53 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:34:53 PM	Tube furnace set to 0
8/9/2010	5:35:53 PM	H2 valve closed
8/9/2010	5:35:53 PM	BCl3 valve closed
8/9/2010	5:35:53 PM	PH3 valve closed
8/9/2010	5:35:53 PM	SiCl4 pre valve closed
8/9/2010	5:35:53 PM	SiCl4 post valve closed
8/9/2010	5:35:53 PM	Bubbler valve closed
8/9/2010	5:35:53 PM	Helium valve opened
8/9/2010	5:35:53 PM	Main Vac valve opened
8/9/2010	5:35:53 PM	Bypass valve opened
8/9/2010	5:35:53 PM	Helium MFC set to  100.000000
8/9/2010	5:35:53 PM	H2 MFC set to  0.000000
8/9/2010	5:35:53 PM	BCl3 MFC set to  0.000000
8/9/2010	5:35:53 PM	PHl3 MFC set to  0.000000
8/9/2010	5:35:53 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:35:53 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:35:53 PM	Tube furnace set to 0
8/9/2010	5:44:53 PM	Helium valve closed
8/9/2010	5:44:53 PM	H2 valve closed
8/9/2010	5:44:53 PM	BCl3 valve closed
8/9/2010	5:44:53 PM	PH3 valve closed
8/9/2010	5:44:53 PM	SiCl4 pre valve closed
8/9/2010	5:44:53 PM	SiCl4 post valve closed
8/9/2010	5:44:53 PM	Bubbler valve closed
8/9/2010	5:44:53 PM	Main Vac valve opened
8/9/2010	5:44:53 PM	Bypass valve opened
8/9/2010	5:44:53 PM	Helium MFC set to  0.000000
8/9/2010	5:44:53 PM	H2 MFC set to  0.000000
8/9/2010	5:44:53 PM	BCl3 MFC set to  0.000000
8/9/2010	5:44:53 PM	PHl3 MFC set to  0.000000
8/9/2010	5:44:53 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:44:53 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:44:53 PM	Tube furnace set to 0
8/9/2010	5:45:53 PM	H2 valve closed
8/9/2010	5:45:53 PM	BCl3 valve closed
8/9/2010	5:45:53 PM	PH3 valve closed
8/9/2010	5:45:53 PM	SiCl4 pre valve closed
8/9/2010	5:45:53 PM	SiCl4 post valve closed
8/9/2010	5:45:53 PM	Bubbler valve closed
8/9/2010	5:45:53 PM	Helium valve opened
8/9/2010	5:45:53 PM	Main Vac valve opened
8/9/2010	5:45:53 PM	Bypass valve opened
8/9/2010	5:45:53 PM	Helium MFC set to  100.000000
8/9/2010	5:45:53 PM	H2 MFC set to  0.000000
8/9/2010	5:45:53 PM	BCl3 MFC set to  0.000000
8/9/2010	5:45:53 PM	PHl3 MFC set to  0.000000
8/9/2010	5:45:53 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:45:53 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:45:53 PM	Tube furnace set to 0
8/9/2010	5:54:53 PM	Helium valve closed
8/9/2010	5:54:53 PM	H2 valve closed
8/9/2010	5:54:53 PM	BCl3 valve closed
8/9/2010	5:54:53 PM	PH3 valve closed
8/9/2010	5:54:53 PM	SiCl4 pre valve closed
8/9/2010	5:54:53 PM	SiCl4 post valve closed
8/9/2010	5:54:53 PM	Bubbler valve closed
8/9/2010	5:54:53 PM	Main Vac valve opened
8/9/2010	5:54:53 PM	Bypass valve opened
8/9/2010	5:54:53 PM	Helium MFC set to  0.000000
8/9/2010	5:54:53 PM	H2 MFC set to  0.000000
8/9/2010	5:54:53 PM	BCl3 MFC set to  0.000000
8/9/2010	5:54:53 PM	PHl3 MFC set to  0.000000
8/9/2010	5:54:53 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:54:53 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:54:53 PM	Tube furnace set to 0
8/9/2010	5:55:53 PM	H2 valve closed
8/9/2010	5:55:53 PM	BCl3 valve closed
8/9/2010	5:55:54 PM	PH3 valve closed
8/9/2010	5:55:54 PM	SiCl4 pre valve closed
8/9/2010	5:55:54 PM	SiCl4 post valve closed
8/9/2010	5:55:54 PM	Bubbler valve closed
8/9/2010	5:55:54 PM	Helium valve opened
8/9/2010	5:55:54 PM	Main Vac valve opened
8/9/2010	5:55:54 PM	Bypass valve opened
8/9/2010	5:55:54 PM	Helium MFC set to  100.000000
8/9/2010	5:55:54 PM	H2 MFC set to  0.000000
8/9/2010	5:55:54 PM	BCl3 MFC set to  0.000000
8/9/2010	5:55:54 PM	PHl3 MFC set to  0.000000
8/9/2010	5:55:54 PM	SiCl4 MFC set to  0.000000
8/9/2010	5:55:54 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	5:55:54 PM	Tube furnace set to 0
8/9/2010	6:04:54 PM	Helium valve closed
8/9/2010	6:04:54 PM	H2 valve closed
8/9/2010	6:04:54 PM	BCl3 valve closed
8/9/2010	6:04:54 PM	PH3 valve closed
8/9/2010	6:04:54 PM	SiCl4 pre valve closed
8/9/2010	6:04:54 PM	SiCl4 post valve closed
8/9/2010	6:04:54 PM	Bubbler valve closed
8/9/2010	6:04:54 PM	Main Vac valve opened
8/9/2010	6:04:54 PM	Bypass valve opened
8/9/2010	6:04:54 PM	Helium MFC set to  0.000000
8/9/2010	6:04:54 PM	H2 MFC set to  0.000000
8/9/2010	6:04:54 PM	BCl3 MFC set to  0.000000
8/9/2010	6:04:54 PM	PHl3 MFC set to  0.000000
8/9/2010	6:04:54 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:04:54 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:04:54 PM	Tube furnace set to 0
8/9/2010	6:04:55 PM	Run finished at 6:04 PM
8/9/2010	6:26:07 PM	Recipe started at 6:26 PM
8/9/2010	6:26:07 PM	Helium valve closed
8/9/2010	6:26:07 PM	H2 valve closed
8/9/2010	6:26:07 PM	BCl3 valve closed
8/9/2010	6:26:07 PM	PH3 valve closed
8/9/2010	6:26:07 PM	SiCl4 pre valve closed
8/9/2010	6:26:07 PM	SiCl4 post valve closed
8/9/2010	6:26:07 PM	Main Vac valve closed
8/9/2010	6:26:07 PM	Bubbler valve closed
8/9/2010	6:26:07 PM	Bypass valve opened
8/9/2010	6:26:07 PM	Helium MFC set to  0.000000
8/9/2010	6:26:07 PM	H2 MFC set to  0.000000
8/9/2010	6:26:07 PM	BCl3 MFC set to  0.000000
8/9/2010	6:26:07 PM	PHl3 MFC set to  0.000000
8/9/2010	6:26:07 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:26:07 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:26:08 PM	Tube furnace set to 0
8/9/2010	6:26:08 PM	Helium valve closed
8/9/2010	6:26:08 PM	H2 valve closed
8/9/2010	6:26:08 PM	BCl3 valve closed
8/9/2010	6:26:08 PM	PH3 valve closed
8/9/2010	6:26:08 PM	SiCl4 pre valve closed
8/9/2010	6:26:08 PM	SiCl4 post valve closed
8/9/2010	6:26:08 PM	Bubbler valve closed
8/9/2010	6:26:08 PM	Main Vac valve opened
8/9/2010	6:26:08 PM	Bypass valve opened
8/9/2010	6:26:08 PM	Helium MFC set to  0.000000
8/9/2010	6:26:08 PM	H2 MFC set to  0.000000
8/9/2010	6:26:08 PM	BCl3 MFC set to  0.000000
8/9/2010	6:26:08 PM	PHl3 MFC set to  0.000000
8/9/2010	6:26:08 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:26:08 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:26:08 PM	Tube furnace set to 0
8/9/2010	6:26:09 PM	H2 valve closed
8/9/2010	6:26:09 PM	BCl3 valve closed
8/9/2010	6:26:09 PM	PH3 valve closed
8/9/2010	6:26:09 PM	SiCl4 pre valve closed
8/9/2010	6:26:09 PM	SiCl4 post valve closed
8/9/2010	6:26:09 PM	Bubbler valve closed
8/9/2010	6:26:09 PM	Helium valve opened
8/9/2010	6:26:09 PM	Main Vac valve opened
8/9/2010	6:26:09 PM	Bypass valve opened
8/9/2010	6:26:09 PM	Helium MFC set to  100.000000
8/9/2010	6:26:09 PM	H2 MFC set to  0.000000
8/9/2010	6:26:09 PM	BCl3 MFC set to  0.000000
8/9/2010	6:26:09 PM	PHl3 MFC set to  0.000000
8/9/2010	6:26:09 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:26:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:26:09 PM	Tube furnace set to 0
8/9/2010	6:26:09 PM	Helium valve closed
8/9/2010	6:26:09 PM	H2 valve closed
8/9/2010	6:26:09 PM	BCl3 valve closed
8/9/2010	6:26:09 PM	PH3 valve closed
8/9/2010	6:26:09 PM	SiCl4 pre valve closed
8/9/2010	6:26:09 PM	SiCl4 post valve closed
8/9/2010	6:26:09 PM	Bubbler valve closed
8/9/2010	6:26:09 PM	Main Vac valve opened
8/9/2010	6:26:09 PM	Bypass valve opened
8/9/2010	6:26:09 PM	Helium MFC set to  0.000000
8/9/2010	6:26:09 PM	H2 MFC set to  0.000000
8/9/2010	6:26:09 PM	BCl3 MFC set to  0.000000
8/9/2010	6:26:09 PM	PHl3 MFC set to  0.000000
8/9/2010	6:26:09 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:26:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:26:09 PM	Tube furnace set to 0
8/9/2010	6:26:10 PM	H2 valve closed
8/9/2010	6:26:10 PM	BCl3 valve closed
8/9/2010	6:26:10 PM	PH3 valve closed
8/9/2010	6:26:10 PM	SiCl4 pre valve closed
8/9/2010	6:26:10 PM	SiCl4 post valve closed
8/9/2010	6:26:10 PM	Bubbler valve closed
8/9/2010	6:26:10 PM	Helium valve opened
8/9/2010	6:26:10 PM	Main Vac valve opened
8/9/2010	6:26:10 PM	Bypass valve opened
8/9/2010	6:26:10 PM	Helium MFC set to  100.000000
8/9/2010	6:26:10 PM	H2 MFC set to  0.000000
8/9/2010	6:26:10 PM	BCl3 MFC set to  0.000000
8/9/2010	6:26:10 PM	PHl3 MFC set to  0.000000
8/9/2010	6:26:10 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:26:10 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:26:10 PM	Tube furnace set to 0
8/9/2010	6:26:11 PM	Helium valve closed
8/9/2010	6:26:11 PM	H2 valve closed
8/9/2010	6:26:11 PM	BCl3 valve closed
8/9/2010	6:26:11 PM	PH3 valve closed
8/9/2010	6:26:11 PM	SiCl4 pre valve closed
8/9/2010	6:26:11 PM	SiCl4 post valve closed
8/9/2010	6:26:11 PM	Bubbler valve closed
8/9/2010	6:26:11 PM	Main Vac valve opened
8/9/2010	6:26:11 PM	Bypass valve opened
8/9/2010	6:26:11 PM	Helium MFC set to  0.000000
8/9/2010	6:26:11 PM	H2 MFC set to  0.000000
8/9/2010	6:26:11 PM	BCl3 MFC set to  0.000000
8/9/2010	6:26:11 PM	PHl3 MFC set to  0.000000
8/9/2010	6:26:11 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:26:11 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:26:11 PM	Tube furnace set to 0
8/9/2010	6:26:12 PM	H2 valve closed
8/9/2010	6:26:12 PM	BCl3 valve closed
8/9/2010	6:26:12 PM	PH3 valve closed
8/9/2010	6:26:12 PM	SiCl4 pre valve closed
8/9/2010	6:26:12 PM	SiCl4 post valve closed
8/9/2010	6:26:12 PM	Bubbler valve closed
8/9/2010	6:26:12 PM	Helium valve opened
8/9/2010	6:26:12 PM	Main Vac valve opened
8/9/2010	6:26:12 PM	Bypass valve opened
8/9/2010	6:26:12 PM	Helium MFC set to  100.000000
8/9/2010	6:26:12 PM	H2 MFC set to  0.000000
8/9/2010	6:26:12 PM	BCl3 MFC set to  0.000000
8/9/2010	6:26:12 PM	PHl3 MFC set to  0.000000
8/9/2010	6:26:12 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:26:12 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:26:12 PM	Tube furnace set to 0
8/9/2010	6:35:12 PM	Helium valve closed
8/9/2010	6:35:12 PM	H2 valve closed
8/9/2010	6:35:12 PM	BCl3 valve closed
8/9/2010	6:35:12 PM	PH3 valve closed
8/9/2010	6:35:12 PM	SiCl4 pre valve closed
8/9/2010	6:35:12 PM	SiCl4 post valve closed
8/9/2010	6:35:12 PM	Bubbler valve closed
8/9/2010	6:35:12 PM	Main Vac valve opened
8/9/2010	6:35:12 PM	Bypass valve opened
8/9/2010	6:35:12 PM	Helium MFC set to  0.000000
8/9/2010	6:35:12 PM	H2 MFC set to  0.000000
8/9/2010	6:35:12 PM	BCl3 MFC set to  0.000000
8/9/2010	6:35:12 PM	PHl3 MFC set to  0.000000
8/9/2010	6:35:12 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:35:12 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:35:12 PM	Tube furnace set to 0
8/9/2010	6:35:13 PM	Run finished at 6:35 PM
8/9/2010	6:37:02 PM	Recipe started at 6:37 PM
8/9/2010	6:37:02 PM	Helium valve closed
8/9/2010	6:37:02 PM	BCl3 valve closed
8/9/2010	6:37:02 PM	PH3 valve closed
8/9/2010	6:37:02 PM	SiCl4 pre valve closed
8/9/2010	6:37:02 PM	SiCl4 post valve closed
8/9/2010	6:37:02 PM	Main Vac valve closed
8/9/2010	6:37:02 PM	Bypass valve closed
8/9/2010	6:37:02 PM	Bubbler valve closed
8/9/2010	6:37:02 PM	H2 valve opened
8/9/2010	6:37:02 PM	Helium MFC set to  0.000000
8/9/2010	6:37:02 PM	H2 MFC set to  500.000000
8/9/2010	6:37:02 PM	BCl3 MFC set to  0.000000
8/9/2010	6:37:02 PM	PHl3 MFC set to  0.000000
8/9/2010	6:37:02 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:37:02 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:37:02 PM	Tube furnace set to 0
8/9/2010	6:38:21 PM	Helium valve closed
8/9/2010	6:38:21 PM	BCl3 valve closed
8/9/2010	6:38:21 PM	PH3 valve closed
8/9/2010	6:38:21 PM	SiCl4 pre valve closed
8/9/2010	6:38:21 PM	SiCl4 post valve closed
8/9/2010	6:38:21 PM	Main Vac valve closed
8/9/2010	6:38:21 PM	Bypass valve closed
8/9/2010	6:38:21 PM	H2 valve opened
8/9/2010	6:38:21 PM	Bubbler valve opened
8/9/2010	6:38:21 PM	Helium MFC set to  0.000000
8/9/2010	6:38:21 PM	H2 MFC set to  500.000000
8/9/2010	6:38:21 PM	BCl3 MFC set to  0.000000
8/9/2010	6:38:21 PM	PHl3 MFC set to  0.000000
8/9/2010	6:38:21 PM	SiCl4 MFC set to  0.000000
8/9/2010	6:38:21 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:38:21 PM	Tube furnace set to 1000
8/9/2010	6:58:21 PM	Helium valve closed
8/9/2010	6:58:21 PM	PH3 valve closed
8/9/2010	6:58:21 PM	Main Vac valve closed
8/9/2010	6:58:21 PM	Bypass valve closed
8/9/2010	6:58:21 PM	H2 valve opened
8/9/2010	6:58:21 PM	BCl3 valve opened
8/9/2010	6:58:21 PM	SiCl4 pre valve opened
8/9/2010	6:58:21 PM	SiCl4 post valve opened
8/9/2010	6:58:21 PM	Bubbler valve opened
8/9/2010	6:58:21 PM	Helium MFC set to  0.000000
8/9/2010	6:58:21 PM	H2 MFC set to  500.000000
8/9/2010	6:58:21 PM	BCl3 MFC set to  25.000000
8/9/2010	6:58:21 PM	PHl3 MFC set to  0.000000
8/9/2010	6:58:21 PM	SiCl4 MFC set to  50.000000
8/9/2010	6:58:21 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	6:58:21 PM	Tube furnace set to 1000
8/9/2010	7:13:21 PM	H2 valve closed
8/9/2010	7:13:21 PM	BCl3 valve closed
8/9/2010	7:13:21 PM	PH3 valve closed
8/9/2010	7:13:21 PM	SiCl4 pre valve closed
8/9/2010	7:13:21 PM	SiCl4 post valve closed
8/9/2010	7:13:21 PM	Main Vac valve closed
8/9/2010	7:13:21 PM	Bypass valve closed
8/9/2010	7:13:21 PM	Helium valve opened
8/9/2010	7:13:21 PM	Bubbler valve opened
8/9/2010	7:13:21 PM	Helium MFC set to  500.000000
8/9/2010	7:13:21 PM	H2 MFC set to  0.000000
8/9/2010	7:13:21 PM	BCl3 MFC set to  0.000000
8/9/2010	7:13:21 PM	PHl3 MFC set to  0.000000
8/9/2010	7:13:21 PM	SiCl4 MFC set to  0.000000
8/9/2010	7:13:21 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:13:21 PM	Tube furnace set to 0
8/9/2010	7:33:21 PM	Helium valve closed
8/9/2010	7:33:21 PM	H2 valve closed
8/9/2010	7:33:21 PM	BCl3 valve closed
8/9/2010	7:33:21 PM	PH3 valve closed
8/9/2010	7:33:21 PM	SiCl4 pre valve closed
8/9/2010	7:33:21 PM	SiCl4 post valve closed
8/9/2010	7:33:21 PM	Main Vac valve closed
8/9/2010	7:33:21 PM	Bypass valve closed
8/9/2010	7:33:21 PM	Bubbler valve closed
8/9/2010	7:33:21 PM	Helium MFC set to  0.000000
8/9/2010	7:33:21 PM	H2 MFC set to  0.000000
8/9/2010	7:33:21 PM	BCl3 MFC set to  0.000000
8/9/2010	7:33:21 PM	PHl3 MFC set to  0.000000
8/9/2010	7:33:21 PM	SiCl4 MFC set to  0.000000
8/9/2010	7:33:21 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:33:22 PM	Tube furnace set to 0
8/9/2010	7:33:22 PM	Run finished at 7:33 PM
8/9/2010	7:35:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2010	7:35:41 PM	Recipe started at 7:35 PM
8/9/2010	7:35:41 PM	H2 valve closed
8/9/2010	7:35:41 PM	BCl3 valve closed
8/9/2010	7:35:41 PM	PH3 valve closed
8/9/2010	7:35:41 PM	SiCl4 pre valve closed
8/9/2010	7:35:41 PM	SiCl4 post valve closed
8/9/2010	7:35:41 PM	Main Vac valve closed
8/9/2010	7:35:41 PM	Bypass valve closed
8/9/2010	7:35:41 PM	Bubbler valve closed
8/9/2010	7:35:41 PM	Helium valve opened
8/9/2010	7:35:41 PM	Helium MFC set to  500.000000
8/9/2010	7:35:41 PM	H2 MFC set to  0.000000
8/9/2010	7:35:41 PM	BCl3 MFC set to  0.000000
8/9/2010	7:35:41 PM	PHl3 MFC set to  0.000000
8/9/2010	7:35:41 PM	SiCl4 MFC set to  0.000000
8/9/2010	7:35:41 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:35:41 PM	Tube furnace set to 0
8/9/2010	7:35:42 PM	Helium valve closed
8/9/2010	7:35:42 PM	H2 valve closed
8/9/2010	7:35:42 PM	BCl3 valve closed
8/9/2010	7:35:42 PM	PH3 valve closed
8/9/2010	7:35:42 PM	SiCl4 pre valve closed
8/9/2010	7:35:42 PM	SiCl4 post valve closed
8/9/2010	7:35:42 PM	Main Vac valve closed
8/9/2010	7:35:42 PM	Bypass valve closed
8/9/2010	7:35:42 PM	Bubbler valve closed
8/9/2010	7:35:42 PM	Helium MFC set to  0.000000
8/9/2010	7:35:42 PM	H2 MFC set to  0.000000
8/9/2010	7:35:42 PM	BCl3 MFC set to  0.000000
8/9/2010	7:35:42 PM	PHl3 MFC set to  0.000000
8/9/2010	7:35:42 PM	SiCl4 MFC set to  0.000000
8/9/2010	7:35:42 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:35:42 PM	Tube furnace set to 0
8/9/2010	7:35:43 PM	Run finished at 7:35 PM
8/9/2010	7:35:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/9/2010	7:43:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	7:43:05 PM	Recipe started at 7:43 PM
8/9/2010	7:43:05 PM	Helium valve closed
8/9/2010	7:43:05 PM	H2 valve closed
8/9/2010	7:43:05 PM	BCl3 valve closed
8/9/2010	7:43:05 PM	PH3 valve closed
8/9/2010	7:43:05 PM	SiCl4 pre valve closed
8/9/2010	7:43:05 PM	SiCl4 post valve closed
8/9/2010	7:43:05 PM	Main Vac valve closed
8/9/2010	7:43:05 PM	Bubbler valve closed
8/9/2010	7:43:05 PM	Bypass valve opened
8/9/2010	7:43:05 PM	Helium MFC set to  0.000000
8/9/2010	7:43:05 PM	H2 MFC set to  0.000000
8/9/2010	7:43:05 PM	BCl3 MFC set to  0.000000
8/9/2010	7:43:05 PM	PHl3 MFC set to  0.000000
8/9/2010	7:43:05 PM	SiCl4 MFC set to  0.000000
8/9/2010	7:43:05 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:43:05 PM	Tube furnace set to 0
8/9/2010	7:43:42 PM	Helium valve closed
8/9/2010	7:43:42 PM	H2 valve closed
8/9/2010	7:43:42 PM	BCl3 valve closed
8/9/2010	7:43:42 PM	PH3 valve closed
8/9/2010	7:43:42 PM	SiCl4 pre valve closed
8/9/2010	7:43:42 PM	SiCl4 post valve closed
8/9/2010	7:43:42 PM	Bubbler valve closed
8/9/2010	7:43:42 PM	Main Vac valve opened
8/9/2010	7:43:42 PM	Bypass valve opened
8/9/2010	7:43:42 PM	Helium MFC set to  0.000000
8/9/2010	7:43:42 PM	H2 MFC set to  0.000000
8/9/2010	7:43:42 PM	BCl3 MFC set to  0.000000
8/9/2010	7:43:42 PM	PHl3 MFC set to  0.000000
8/9/2010	7:43:42 PM	SiCl4 MFC set to  0.000000
8/9/2010	7:43:42 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	7:43:42 PM	Tube furnace set to 0
8/9/2010	7:43:42 PM	Run finished at 7:43 PM
8/9/2010	7:43:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	8:31:09 PM	Recipe started at 8:31 PM
8/9/2010	8:31:09 PM	Helium valve closed
8/9/2010	8:31:09 PM	H2 valve closed
8/9/2010	8:31:09 PM	BCl3 valve closed
8/9/2010	8:31:09 PM	PH3 valve closed
8/9/2010	8:31:09 PM	SiCl4 pre valve closed
8/9/2010	8:31:09 PM	SiCl4 post valve closed
8/9/2010	8:31:09 PM	Main Vac valve closed
8/9/2010	8:31:09 PM	Bubbler valve closed
8/9/2010	8:31:09 PM	Bypass valve opened
8/9/2010	8:31:09 PM	Helium MFC set to  0.000000
8/9/2010	8:31:09 PM	H2 MFC set to  0.000000
8/9/2010	8:31:09 PM	BCl3 MFC set to  0.000000
8/9/2010	8:31:09 PM	PHl3 MFC set to  0.000000
8/9/2010	8:31:09 PM	SiCl4 MFC set to  0.000000
8/9/2010	8:31:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	8:31:09 PM	Tube furnace set to 0
8/9/2010	8:31:09 PM	Helium valve closed
8/9/2010	8:31:09 PM	H2 valve closed
8/9/2010	8:31:09 PM	BCl3 valve closed
8/9/2010	8:31:09 PM	PH3 valve closed
8/9/2010	8:31:09 PM	SiCl4 pre valve closed
8/9/2010	8:31:09 PM	SiCl4 post valve closed
8/9/2010	8:31:09 PM	Bubbler valve closed
8/9/2010	8:31:09 PM	Main Vac valve opened
8/9/2010	8:31:09 PM	Bypass valve opened
8/9/2010	8:31:09 PM	Helium MFC set to  0.000000
8/9/2010	8:31:09 PM	H2 MFC set to  0.000000
8/9/2010	8:31:09 PM	BCl3 MFC set to  0.000000
8/9/2010	8:31:09 PM	PHl3 MFC set to  0.000000
8/9/2010	8:31:09 PM	SiCl4 MFC set to  0.000000
8/9/2010	8:31:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	8:31:09 PM	Tube furnace set to 0
8/9/2010	8:32:09 PM	H2 valve closed
8/9/2010	8:32:09 PM	BCl3 valve closed
8/9/2010	8:32:09 PM	PH3 valve closed
8/9/2010	8:32:09 PM	SiCl4 pre valve closed
8/9/2010	8:32:09 PM	SiCl4 post valve closed
8/9/2010	8:32:09 PM	Bubbler valve closed
8/9/2010	8:32:09 PM	Helium valve opened
8/9/2010	8:32:09 PM	Main Vac valve opened
8/9/2010	8:32:09 PM	Bypass valve opened
8/9/2010	8:32:09 PM	Helium MFC set to  100.000000
8/9/2010	8:32:09 PM	H2 MFC set to  0.000000
8/9/2010	8:32:09 PM	BCl3 MFC set to  0.000000
8/9/2010	8:32:09 PM	PHl3 MFC set to  0.000000
8/9/2010	8:32:09 PM	SiCl4 MFC set to  0.000000
8/9/2010	8:32:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	8:32:09 PM	Tube furnace set to 0
8/9/2010	8:41:09 PM	Helium valve closed
8/9/2010	8:41:09 PM	H2 valve closed
8/9/2010	8:41:09 PM	BCl3 valve closed
8/9/2010	8:41:09 PM	PH3 valve closed
8/9/2010	8:41:09 PM	SiCl4 pre valve closed
8/9/2010	8:41:09 PM	SiCl4 post valve closed
8/9/2010	8:41:09 PM	Bubbler valve closed
8/9/2010	8:41:09 PM	Main Vac valve opened
8/9/2010	8:41:09 PM	Bypass valve opened
8/9/2010	8:41:09 PM	Helium MFC set to  0.000000
8/9/2010	8:41:09 PM	H2 MFC set to  0.000000
8/9/2010	8:41:09 PM	BCl3 MFC set to  0.000000
8/9/2010	8:41:09 PM	PHl3 MFC set to  0.000000
8/9/2010	8:41:09 PM	SiCl4 MFC set to  0.000000
8/9/2010	8:41:09 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	8:41:10 PM	Tube furnace set to 0
8/9/2010	8:42:10 PM	H2 valve closed
8/9/2010	8:42:10 PM	BCl3 valve closed
8/9/2010	8:42:10 PM	PH3 valve closed
8/9/2010	8:42:10 PM	SiCl4 pre valve closed
8/9/2010	8:42:10 PM	SiCl4 post valve closed
8/9/2010	8:42:10 PM	Bubbler valve closed
8/9/2010	8:42:10 PM	Helium valve opened
8/9/2010	8:42:10 PM	Main Vac valve opened
8/9/2010	8:42:10 PM	Bypass valve opened
8/9/2010	8:42:10 PM	Helium MFC set to  100.000000
8/9/2010	8:42:10 PM	H2 MFC set to  0.000000
8/9/2010	8:42:10 PM	BCl3 MFC set to  0.000000
8/9/2010	8:42:10 PM	PHl3 MFC set to  0.000000
8/9/2010	8:42:10 PM	SiCl4 MFC set to  0.000000
8/9/2010	8:42:10 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	8:42:10 PM	Tube furnace set to 0
8/9/2010	8:51:10 PM	Helium valve closed
8/9/2010	8:51:10 PM	H2 valve closed
8/9/2010	8:51:10 PM	BCl3 valve closed
8/9/2010	8:51:10 PM	PH3 valve closed
8/9/2010	8:51:10 PM	SiCl4 pre valve closed
8/9/2010	8:51:10 PM	SiCl4 post valve closed
8/9/2010	8:51:10 PM	Bubbler valve closed
8/9/2010	8:51:10 PM	Main Vac valve opened
8/9/2010	8:51:10 PM	Bypass valve opened
8/9/2010	8:51:10 PM	Helium MFC set to  0.000000
8/9/2010	8:51:10 PM	H2 MFC set to  0.000000
8/9/2010	8:51:10 PM	BCl3 MFC set to  0.000000
8/9/2010	8:51:10 PM	PHl3 MFC set to  0.000000
8/9/2010	8:51:10 PM	SiCl4 MFC set to  0.000000
8/9/2010	8:51:10 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	8:51:10 PM	Tube furnace set to 0
8/9/2010	8:52:10 PM	H2 valve closed
8/9/2010	8:52:10 PM	BCl3 valve closed
8/9/2010	8:52:10 PM	PH3 valve closed
8/9/2010	8:52:10 PM	SiCl4 pre valve closed
8/9/2010	8:52:10 PM	SiCl4 post valve closed
8/9/2010	8:52:10 PM	Bubbler valve closed
8/9/2010	8:52:10 PM	Helium valve opened
8/9/2010	8:52:10 PM	Main Vac valve opened
8/9/2010	8:52:10 PM	Bypass valve opened
8/9/2010	8:52:10 PM	Helium MFC set to  100.000000
8/9/2010	8:52:10 PM	H2 MFC set to  0.000000
8/9/2010	8:52:10 PM	BCl3 MFC set to  0.000000
8/9/2010	8:52:10 PM	PHl3 MFC set to  0.000000
8/9/2010	8:52:10 PM	SiCl4 MFC set to  0.000000
8/9/2010	8:52:10 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	8:52:10 PM	Tube furnace set to 0
8/9/2010	9:01:10 PM	Helium valve closed
8/9/2010	9:01:10 PM	H2 valve closed
8/9/2010	9:01:10 PM	BCl3 valve closed
8/9/2010	9:01:10 PM	PH3 valve closed
8/9/2010	9:01:10 PM	SiCl4 pre valve closed
8/9/2010	9:01:10 PM	SiCl4 post valve closed
8/9/2010	9:01:10 PM	Bubbler valve closed
8/9/2010	9:01:10 PM	Main Vac valve opened
8/9/2010	9:01:10 PM	Bypass valve opened
8/9/2010	9:01:10 PM	Helium MFC set to  0.000000
8/9/2010	9:01:10 PM	H2 MFC set to  0.000000
8/9/2010	9:01:10 PM	BCl3 MFC set to  0.000000
8/9/2010	9:01:10 PM	PHl3 MFC set to  0.000000
8/9/2010	9:01:10 PM	SiCl4 MFC set to  0.000000
8/9/2010	9:01:10 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	9:01:10 PM	Tube furnace set to 0
8/9/2010	9:01:11 PM	Run finished at 9:01 PM
8/9/2010	9:02:10 PM	Recipe started at 9:02 PM
8/9/2010	9:02:10 PM	Helium valve closed
8/9/2010	9:02:10 PM	BCl3 valve closed
8/9/2010	9:02:10 PM	PH3 valve closed
8/9/2010	9:02:10 PM	SiCl4 pre valve closed
8/9/2010	9:02:10 PM	SiCl4 post valve closed
8/9/2010	9:02:10 PM	Main Vac valve closed
8/9/2010	9:02:10 PM	Bypass valve closed
8/9/2010	9:02:10 PM	Bubbler valve closed
8/9/2010	9:02:10 PM	H2 valve opened
8/9/2010	9:02:10 PM	Helium MFC set to  0.000000
8/9/2010	9:02:10 PM	H2 MFC set to  500.000000
8/9/2010	9:02:10 PM	BCl3 MFC set to  0.000000
8/9/2010	9:02:10 PM	PHl3 MFC set to  0.000000
8/9/2010	9:02:10 PM	SiCl4 MFC set to  0.000000
8/9/2010	9:02:10 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	9:02:10 PM	Tube furnace set to 0
8/9/2010	9:03:28 PM	Helium valve closed
8/9/2010	9:03:28 PM	BCl3 valve closed
8/9/2010	9:03:28 PM	PH3 valve closed
8/9/2010	9:03:28 PM	SiCl4 pre valve closed
8/9/2010	9:03:28 PM	SiCl4 post valve closed
8/9/2010	9:03:28 PM	Main Vac valve closed
8/9/2010	9:03:28 PM	Bypass valve closed
8/9/2010	9:03:28 PM	H2 valve opened
8/9/2010	9:03:28 PM	Bubbler valve opened
8/9/2010	9:03:28 PM	Helium MFC set to  0.000000
8/9/2010	9:03:28 PM	H2 MFC set to  500.000000
8/9/2010	9:03:28 PM	BCl3 MFC set to  0.000000
8/9/2010	9:03:28 PM	PHl3 MFC set to  0.000000
8/9/2010	9:03:28 PM	SiCl4 MFC set to  0.000000
8/9/2010	9:03:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	9:03:28 PM	Tube furnace set to 1000
8/9/2010	9:23:28 PM	Helium valve closed
8/9/2010	9:23:28 PM	PH3 valve closed
8/9/2010	9:23:28 PM	Main Vac valve closed
8/9/2010	9:23:28 PM	Bypass valve closed
8/9/2010	9:23:28 PM	H2 valve opened
8/9/2010	9:23:28 PM	BCl3 valve opened
8/9/2010	9:23:28 PM	SiCl4 pre valve opened
8/9/2010	9:23:28 PM	SiCl4 post valve opened
8/9/2010	9:23:28 PM	Bubbler valve opened
8/9/2010	9:23:28 PM	Helium MFC set to  0.000000
8/9/2010	9:23:28 PM	H2 MFC set to  500.000000
8/9/2010	9:23:28 PM	BCl3 MFC set to  25.000000
8/9/2010	9:23:28 PM	PHl3 MFC set to  0.000000
8/9/2010	9:23:28 PM	SiCl4 MFC set to  50.000000
8/9/2010	9:23:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	9:23:28 PM	Tube furnace set to 1000
8/9/2010	9:38:28 PM	H2 valve closed
8/9/2010	9:38:28 PM	BCl3 valve closed
8/9/2010	9:38:28 PM	PH3 valve closed
8/9/2010	9:38:28 PM	SiCl4 pre valve closed
8/9/2010	9:38:28 PM	SiCl4 post valve closed
8/9/2010	9:38:28 PM	Main Vac valve closed
8/9/2010	9:38:28 PM	Bypass valve closed
8/9/2010	9:38:28 PM	Helium valve opened
8/9/2010	9:38:28 PM	Bubbler valve opened
8/9/2010	9:38:28 PM	Helium MFC set to  500.000000
8/9/2010	9:38:28 PM	H2 MFC set to  0.000000
8/9/2010	9:38:28 PM	BCl3 MFC set to  0.000000
8/9/2010	9:38:28 PM	PHl3 MFC set to  0.000000
8/9/2010	9:38:28 PM	SiCl4 MFC set to  0.000000
8/9/2010	9:38:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	9:38:28 PM	Tube furnace set to 0
8/9/2010	9:58:28 PM	Helium valve closed
8/9/2010	9:58:28 PM	H2 valve closed
8/9/2010	9:58:28 PM	BCl3 valve closed
8/9/2010	9:58:28 PM	PH3 valve closed
8/9/2010	9:58:28 PM	SiCl4 pre valve closed
8/9/2010	9:58:28 PM	SiCl4 post valve closed
8/9/2010	9:58:28 PM	Main Vac valve closed
8/9/2010	9:58:28 PM	Bypass valve closed
8/9/2010	9:58:28 PM	Bubbler valve closed
8/9/2010	9:58:28 PM	Helium MFC set to  0.000000
8/9/2010	9:58:28 PM	H2 MFC set to  0.000000
8/9/2010	9:58:28 PM	BCl3 MFC set to  0.000000
8/9/2010	9:58:28 PM	PHl3 MFC set to  0.000000
8/9/2010	9:58:28 PM	SiCl4 MFC set to  0.000000
8/9/2010	9:58:28 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	9:58:28 PM	Tube furnace set to 0
8/9/2010	9:58:29 PM	Run finished at 9:58 PM
8/9/2010	10:00:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/9/2010	10:00:52 PM	Recipe started at 10:00 PM
8/9/2010	10:00:52 PM	Helium valve closed
8/9/2010	10:00:52 PM	H2 valve closed
8/9/2010	10:00:52 PM	BCl3 valve closed
8/9/2010	10:00:52 PM	PH3 valve closed
8/9/2010	10:00:52 PM	SiCl4 pre valve closed
8/9/2010	10:00:52 PM	SiCl4 post valve closed
8/9/2010	10:00:52 PM	Main Vac valve closed
8/9/2010	10:00:52 PM	Bubbler valve closed
8/9/2010	10:00:52 PM	Bypass valve opened
8/9/2010	10:00:52 PM	Helium MFC set to  0.000000
8/9/2010	10:00:52 PM	H2 MFC set to  0.000000
8/9/2010	10:00:52 PM	BCl3 MFC set to  0.000000
8/9/2010	10:00:52 PM	PHl3 MFC set to  0.000000
8/9/2010	10:00:52 PM	SiCl4 MFC set to  0.000000
8/9/2010	10:00:52 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	10:00:52 PM	Tube furnace set to 0
8/9/2010	10:01:26 PM	Helium valve closed
8/9/2010	10:01:26 PM	H2 valve closed
8/9/2010	10:01:26 PM	BCl3 valve closed
8/9/2010	10:01:26 PM	PH3 valve closed
8/9/2010	10:01:26 PM	SiCl4 pre valve closed
8/9/2010	10:01:26 PM	SiCl4 post valve closed
8/9/2010	10:01:26 PM	Bubbler valve closed
8/9/2010	10:01:26 PM	Main Vac valve opened
8/9/2010	10:01:26 PM	Bypass valve opened
8/9/2010	10:01:26 PM	Helium MFC set to  0.000000
8/9/2010	10:01:26 PM	H2 MFC set to  0.000000
8/9/2010	10:01:26 PM	BCl3 MFC set to  0.000000
8/9/2010	10:01:26 PM	PHl3 MFC set to  0.000000
8/9/2010	10:01:26 PM	SiCl4 MFC set to  0.000000
8/9/2010	10:01:26 PM	Bypass solenoid MFC set to  0.000000
8/9/2010	10:01:26 PM	Tube furnace set to 0
8/9/2010	10:01:26 PM	Run finished at 10:01 PM
8/9/2010	10:01:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
